10000.0 9.04920e-14 11514.0 6.00303e-14 13257.1 3.95145e-14 15264.2 2.57771e-14 17575.1 1.66409e-14 20235.9 1.06131e-14 23299.5 6.67313e-15 26827.0 4.12632e-15 30888.4 2.50152e-15 35564.8 1.48111e-15 40949.1 8.52866e-16 47148.7 4.75798e-16 54286.8 2.55883e-16 62505.5 1.31924e-16 71968.6 6.47541e-17 82864.3 2.99789e-17 95409.5 1.29263e-17 109854. 5.10973e-18 126486. 1.82106e-18 145635. 5.73980e-19 167683. 1.56957e-19 193070. 3.61924e-20 222300. 6.88136e-21 255955. 1.05321e-21 294705. 1.26674e-22 339322. 1.16325e-23 390694. 7.90113e-25 449843. 3.92640e-26 517947. 1.40024e-27 596362. 3.51213e-29 686649. 5.88263e-31 790604. 6.47793e-33 910298. 4.43976e-35 1.04811e+06 1.76706e-37 1.20679e+06 3.66133e-40 1.38950e+06 3.44719e-43